磊晶爐 EPI reactor

MT7700

1. MT7700 Configuration

• 5 Lamp Modules – 20 Lamps Each
  
  
• Refined 9-Zone Temperature Control
  |
• New Susceptor
  
  
• New Quartz Bell Jar
  
  
• New Quartz Hanger
  
  
• New Cooling Plates
  
  
•  New Patented Gold Reflectors
  
  
• New Controller – Rapid Heat-up Option
  
  
• Kits Available for Your Installed System

2. MT7700K Configuration

• 5 Lamp Modules – 23 Lamps Each

• New 8-Zone Temperature Control

• New Susceptor – Expanded Loading

• New Quartz Bell Jar

• New Quartz Hanger

• New Cooling Plates

• Improved Gold Reflectors – Patented

• New Controller “Turbobaby” – Rapid Heat-up Option